- Unité d'enseignement : Surface analysis techniques
Nombre de crédits de l'UE : 6
Code APOGEE : PHY2406M
Type d'enseignement
Nb heures *
Cours Magistraux (CM)
30 h
Travaux Dirigés (TD)
14 h
Travaux Pratiques (TP)
4 h
* Ces horaires sont donnés à titre indicatif.
Pré-requis :
Quantum mechanics bases (electronic structure)
Classes of materials
Basic mechanics (Newton law and Kinetic energy theorem) and electromagnetism (Coulomb force, Lorentz force)
Compétences attestées (transversales, spécifiques) :
Overview of the surface characterization techniques
Identification of the most appropriate technique(s) to solve a problem related to surface chemistry
Being able to exchange with specialists in surface characterization techniques
Being aware of most common artifacts
Programme de l'UE / Thématiques abordées :
This course introduces the main methods involved in the surface analysis of material surfaces. It tackles questions on the chemistry and physics of the various approaches and discusses the advantages and shortcomings of a high number of methods including X-Ray Photoelectron Spectroscopy, Auger Electron Spectroscopy, Scanning Electron Microscopy, Secondary Ion Mass Spectrometry, Ion Scattering Spectroscopy, etc.
1. Introduction
Context - Parameters
X-Ray interaction with matter
Electron interaction with matter
Ion interaction with matter
2. X-Ray detection based surface analysis techniques
2.1. XRF - X-ray Fluorescence
• Principles (characteristic X-rays, scattered X-rays)
• Instrumentation (X-ray sources, WDS)
• Qualitative and quantitative analysis (matrix effects)
• Applications
2.2. EPMA - Electron Probe Micro-Analysis / Scanning Electron Microscopy + EDS
• Principles (characteristic X-rays)
• Instrumentation (electron gun, EDS)
• Qualitative and quantitative analysis (imaging, matrix effects)
• Applications
3. Electron detection based surface analysis techniques
3.1. XPS – X-ray Photoelectron Spectroscopy
• Principles (photoelectric effect, calibration, charge effect)
• Instrumentation
• Qualitative and quantitative analysis (core levels, chemical shifts, Auger parameter, valence levels, imaging)
• Applications
3.2. AES – Auger Electron Spectroscopy
• Principles (Auger electron energy; spectra derivation)
• Instrumentation
• Qualitative and quantitative analysis (qualitative analysis, depth profiling, SAM, chemical shifts)
• Applications
4. Ion detection based surface analysis techniques
4.1. SIMS – Secondary Ion Mass Spectrometry
• Sputtering & ionization
• Instrumentation (ion sources, mass analyzers, detectors)
• Dynamic SIMS (SIMS) vs static SIMS (ToF-SIMS)
• Depth profiling, mass spectra and SIMS imaging
• Applications
4.2. ISS – Ion Scattering Spectroscopy & RBS – Rutherford Backscattering
• Low energy ion diffusion - ISS
• High energy ion diffusion - RBS
• Instrumentation
• Applications
Practical:
ToF-SIMS – Time-of-Flight Secondary Ion Mass Spectrometry and XPS – X-ray Photoelectron Spectroscopy
Parcours / Spécialité / Filière / Option utilisant cette UE :
Date de la dernière mise-à-jour : 13/09/2017
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